RF & DC Power
RF & DC Power
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DC Power Generators
DC Power Supplies and DC Power Generators
MKS RPDG generators provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) bias and enhancement coating applications. The RPDG line eliminates yield-limiting factors, thus enabling existing PVD tools to produce the high quality, low-defect films needed for next generation processes.
RPDG-50 5kW Pulsed DC Plasma Generator
- Asymmetric bipolar and unipolar DC power in a single unit (3U)
- Programmable frequency, and duty cycle.
RPDG-100 10kW Pulsed DC Plasma Generator
- Asymmetric bipolar and unipolar DC power in a single unit (3U)
- Programmable frequency, and duty cycle.
RPDG-200 20kW Pulsed DC Plasma Generator
- Asymmetric bipolar and unipolar DC power
- Programmable frequency, and duty cycle.
RF Power Generators
RF Generator Products with Precise DSP-based Power Control
MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.
Products
2MHz RF Plasma Generators
13.56MHz RF Plasma Generators
- GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators
- elite™ Series 750, 600, & 300 Watt, 13.56 MHz, RF Plasma Generators
Visit MKS site for more information of these products.
Dimensions
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