Reactive Gas
Reactive Gas
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Dissolved CO2
Compact Carbonated Ultrapure Water Delivery System
The DI-SOLVER CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (carbonated ultra-pure water) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2 concentration in the DI-CO2 water..
Features
- Closed-loop conductivity control
- Small, compact module for integration
- Low cost of ownership, no CO2 and no UPW consumption at process pauses
- Maximum conductivity at physical limits
- Highest accuracy
- Flow is allowed to change between 0.5 - 90 L/min to keep conductivity stable (up to ± 3%)
- Maintenance-free contactor
Applications
- Several process steps in the semiconductor industry require de-ionized (DI) water with precisely defined conductivity. The DI-SOLVER CO2 meets this demand.
Download data sheet for more information
Ozone
MKS offers a complete spectrum of ultra clean, highly reliable ozone generation, delivery and accessory products. The ozone product family includes compact, high concentration ozone generators, closed-loop controlled ozone gas delivery subsystems, state-of-the-art, high concentration dissolved ozone liquid delivery subsystems and ozone accessories for flow mixing and ozone destruction.
Categories
- Dissolved Ozone Delivery Systems
- Ozone Gas Generators
- Ozone Gas Delivery Systems
- Ozone Sanitization
- Accessories for Ozone Products
Visit MKS site for more information of these products.
Dimensions
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