IXL Dry Pump

Name: IXL Dry Pump
Brand: VACPRO - Vacuum Process Solutions
Availability: OutOfStock

The iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations with extremely low power consumption.

110 - 930 m³/h

Hermetically Sealed, innovative mechanism

0.013 / 0.001 MBAR

Superior vacuum levels achieved

'Plug and Pump'

Integral controller and safety systems for flexible operation. Low installation costs.

<55DB(A)

Smooth, low noise and vibration operation

No routine maintenance

Oil lubricated precision bearings with no routine maintenance

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IXL Sizes		iXL120	iXL1000N
Peak pumping speed	m³/h	110	930
Ultimate pressure	mbar	0.013	0.001
Power at ultimate	kW	0.55	1
Power in Green Mode	kW	0.045	0.05
Noise at ultimate	dB(A)	<55	<5

Documentation

iXL 120 datasheet

The iXL is available as the iXL120N stand-alone unit, or as the iXL1000N combination, which includes an inverter-driven booster delivering 930 m³/h peak pumping speed.

iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. It’s low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!

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Product Features

LOW POWER
Only 0.55kW* power consuption helps minimise customers cost of ownership
UNIQUE PERFORMANCE
Class leading chamber pump down time reduces total average cycle time (TACT)
SMOOTH RUNNING
Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance

COMPACT
iXL120 is extremely small and light, saving valuable space
ZERO PURGE OPTION
Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs
GREEN MODE
Green Mode can reduce power consumption by up to 92% during idle periods

Dimensions

Performance Curve

Sustainability

From renewable energy, standard recycling programme for all our pumps, to favouring energy efficient products, we strive to reduce our environmental footprint as a company as well as our products and services

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