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IXH Dry Pump

IXH Dry Pump

The iXH dry pump range is an evolution of our market leading iH, and sets new standards for harsh process capability, reliability and lower cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.


100 - 6.000 m³/h

Modular design with a wide range of pump sizes

More process capability

Greatly increased powder handling capability and innovative Gas Buster™ technology

'Plug and Pump'

Integral controller and safety systems for flexible operation. Low installation costs.

No routine maintenance

No preventive maintenance between major overhauls

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IXH SIZES

iXH100 iXH610 iXH1210
Peak pumping speed m3/h 100 665 1025
Ultimate pressure mbar 0.02 0.005 0.005
Power at ultimate kW 2.1 2.6 3.2
Power in Green Mode kW 0.045 0.045 0.045
Noise at ultimate dB(A) 63 64 64

iXH sets new standards for really harsh process capabilities, reliability, and low cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.

A wide pump temperature range allows optimisation to minimise by-product accumulation from condensation and plating reactions. iXH is available as primary pump at 100 m³/h (the iXH100) or combined with inverter-driven boosters delivering peak speeds of 665 m³/h (iXH610) or 1025 m³/h (iXH1210).

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  • PERFORMANCE

    High capacity dry pumps and boosters give an expanded process window to enhance yields

    POWDER HANDLING

    Greatly increased powder handling capability and innovati ve Gas Buster™ (1) technology

  • HYDROGEN PUMPING

    Greatly increased hydrogen pumping speed for advanced EPI and solar processes

    TEMPERATURE CONTROL

    Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation and plating

  • ZERO MAINTENANCE

    Zero maintenance between overhauls and low cost of ownership

    ENERGY EFFICIENT

    Low power consumption plus Green Mode plus no routine maintenance, for low cost of ownership

Sustainability

From renewable energy, standard recycling programme for all our pumps, to favouring energy efficient products, we strive to reduce our environmental footprint as a company as well as our products and services

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