Ganymede harsh-duty dry vacuum pump

Name: Ganymede harsh-duty dry vacuum pump
Brand: VACPRO - Vacuum Process Solutions
Availability: OutOfStock

Global benchmark in vacuum innovation

View full details

Next-generation platform for harsh fab applications

Built on an entirely re-engineered platform, Ganymede features a high‑efficiency powertrain, an extensive sensor network, and a novel pumping mechanism that enables reliability and control in demanding fab environments.

Delivering lower total cost of ownership (TCoO), predictive intelligence, and stable operation, Ganymede is designed to support smarter, more sustainable semiconductor production.

Key Features and Benefits:

High Reliability
High Velocity Roots and Microclaw™ technology for unrivalled powder handling leading to up to 3 x better powder handling capabilities for uninterrupted performance.

Low Total Cost of Ownership
Optimised power, water and nitrogen consumption significantly reduces operating costs. Offering 50% energy savings, 40% reduction in PCW usage, up to 25% reduction in nitrogen use.

Small Footprint
Compact, space saving design. Ganymede offers a 30% smaller footprint enabling higher chamber density in the subfab, increasing productivity per square foot.

Enhanced Data, Sensors and Intelligence
Delivering real-time insights through predictive maintenance leading to optimised performance.

Enhanced Sustainability
Low PFAS content and up to 49% reduction in customer Scope 2 CO2 equivalent lifecycle emissions supporting fabwide environmental objecvtives and longterm sustainability strategies.

1 5

Built for the most challenging semiconductor processes

PECVD, ALD, PEALD, SACVD, LPCVD, Epitaxy

Ganymede is engineered to withstand the toughest chemistries and by‑products:

Powders – High‑torque powertrain and smart powder management move heavy powder loads without excessive energy use.
Condensables – Temperature‑profile management minimises deposition on precision components.

Want to learn more about Ganymede?

Discover our new Ganymede product line in the innovation hub, keep informed about its development, and find out more about the technology driving this product.

Learn more about our Ganymede product line

Sustainability

From renewable energy, standard recycling programme for all our pumps, to favouring energy efficient products, we strive to reduce our environmental footprint as a company as well as our products and services

Vaccum Pump Selection Guide
Find Pump

Do you have any questions?
Free Inquiry

You can give us a call back
Request a Call

Trusted By Industry Leaders

Trusted by leading organisations across R&D, semiconductor, pharmaceutical, and industrial sectors, we deliver reliable vacuum solutions backed by decades of technical expertise.