
GE50A
GE50A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller
Download data sheet for more information
Features
- Flow Rates up to 50 slm
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez (gas dependent)
- Less than 750 millisecond settling time
- Standard closed conductance leak rate of less than 0.1% of Full Scale
GM50A/GM51A
GM50A/GM51A General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option
Download GM50A data sheet for more information
Download GM51A data sheet for more information
Features
- Flow Rates up to 50 slm
- Metal sealed with Teflon valve plug
- Less than 750 millisecond settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
GM100A
GM100A General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option
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Features
- Flow Rates from 50 to 100 slm, N2 equivalent
- Metal sealed with elastomer plug
- Less than 750 millisecond settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
GV50A
GV50A General Purpose Multi-gas, Multi-range, Elastomer sealed Mass Flow Controller with Integral Shut-off Valve
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Features
- Flow Rates up to 50 slm
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez (gas dependent)
- Less than 750 millisecond settling time
- Shut-off valve leak rate of less than 4x10⁻⁹ atm-cc/sec He
GE250A & GE300A
GE250A & GE300A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controllers
Download GE250A data sheet for more information
Download GE300A data sheet for more information
Features
- Flow Rates from 100 to 300 slm
- Seal and valve plug option of Viton, Buna, Neoprene or EPDM (gas dependent)
- 1 to 2 second settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
Dimensions
Performance Curve
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