
Applications
The EXS pump is suitable for a range of applications in various industries including:
Lithium-ion battery
- Electrode drying
- Electrolyte filling
- Formation
Metallurgy
- Vacuum Brazing
- E-beam welding
- Nitro carburising
- Low pressure nitriding
- Low pressure carburising
- Carbon vapour impregnation
- Sintering
- Metal injection moulding
- Precision investment casting
- Vacuum arc refining
- Steel degassing
Plasma processes
- Plasma welding
- Plasma nitriding
Vacuum chamber evacuation
- Space simulation chambers
- Gas recovery/circulation
- Load lock chambers
Solar
- Silicon crystal-pulling
- PV lamination
Coating
- Roll web coating
- Hard coating (CVD/DLC)
- Surface activation
- Plasma spray
- Glass coating
Technical specifications
Specification |
Unit | EXS160 | EXS160/1750 | EXS250 | EXS250/2600 | |
|---|---|---|---|---|---|---|
| General | Ultimate vacuum | mbar (Torr) |
1x10-2 (8x10-3) | <1x10-3 (<8x10-4) | 1x10-2 (8x10-3) | <1x10-3 (<8x10-4) |
| Peak pumping speed | m3/hr (cfm) |
160 (94) | 1200 (706) | 250 (147) | 1900 (1118) | |
| Maximum rotor speed | Rev/min | 6600 | DP: 6600 MB: 6120 |
6600 | DP: 6600 MB: 6120 |
|
| Inlet/Outlet | ISO63/NW40 | ISO100/NW40 | ISO63/NW40 | ISO160/NW40 | ||
| Electrical | Electrical supply | V | 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz |
380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz |
380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz |
380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz |
| Ultimate power | kW (hp) | 3.8 (5.1) | 5.1 (6.8) | 4.0 (5.4) | 5.3 (7.1) | |
| Full load power | kW (hp) | 5.0 (6.7) | 7.4 (9.9) | 9.0 (12.1) | 9.7 (13.0) | |
| Cooling | Connection | inch | ⅜" BSP male | ⅜" BSP male | ⅜" BSP male | ⅜" BSP male |
| Cooling flow (Always on) | l/min (gal/min) |
4.0 (1.1) | 7.0 (1.9) | 4.0 (1.1) | 7.0 (1.9) | |
| Minimum differential pressure | bar | 1 | 1 | 1 | 1 | |
| Maximum supply pressure | barg (psig) |
6.9 (100) | 6.9 (100) | 6.9 (100) | 6.9 (100) | |
| Temperature | °C (°F) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | |
| Purge | Connection | inch | ½" BSP male | ½" BSP male | ½" BSP male | ½" BSP male |
| Pressure | barg (psig) |
2.5-6.9 (36-100) | 2.5-6.9 (36-100) | 2.5-6.9 (36-100) | 2.5-6.9 (36-100) | |
| Shaft seal flow (Always on) | l/min (gal/min) |
12 (3.17) | 12 (3.17) | 12 (3.17) | 12 (3.17) | |
| Gas ballast flow (Manual adj.) | l/min (gal/min) |
0-50 (0-13.2) | 0-50 (0-13.2) | 0-50 (0-13.2) | 0-50 (0-13.2) | |
| Operation | Ambient temperature range | °C (°F) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) |
| Noise level with silencer | dB(A) | <64 | <64 | <64 | <64 | |
| Maximum exhaust back pressure | bara (psig) |
1.2 (17.4) | 1.2 (17.4) | 1.2 (17.4) | 1.2 (17.4) | |
| Lubrication | Oil | PFPE Drynert 25/6 | PFPE Drynert 25/6 | PFPE Drynert 25/6 | PFPE Drynert 25/6 | |
| Oil volume | l (gal) | 0.7 (0.2) | 1.4 (0.4) | 0.7 (0.2) | 1.4 (0.4) |
Specification |
Unit | EXS450 | EXS450/2600 | EXS450/4200 | EXS750 | EXS750/2600 | EXS750/4200 | |
|---|---|---|---|---|---|---|---|---|
| General | Ultimate vacuum | mbar (Torr) |
1x10-2 (8x10-3) | <1x10-3 (<8x10-4) | <1x10-3 (<8x10-4) | 1x10-2 (8x10-3) | <1x10-3 (<8x10-4) | <1x10-3 (<8x10-4) |
| Peak pumping speed | m3/hr (cfm) |
450 (265) | 2200 (1295) | 3026 (1781) | 740 (435) | 2300 (1354) | 3450 (2032) | |
| Maximum rotor speed | Rev/min | 6600 | DP: 6600 MB: 6120 |
DP: 6600 MB: 6120 |
6600 | DP: 6600 MB: 6120 |
DP: 6600 MB: 6120 |
|
| Inlet/Outlet | ISO100/NW50 | ISO160/ISO63 | ISO160/ISO63 | ISO100/NW50 | ISO160/ISO63 | ISO160/ISO63 | ||
| Electrical | Electrical supply | V | 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz |
380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz |
380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz |
380 - 460 3Ph 50/60Hz |
380 - 460 3Ph 50/60Hz |
380 - 460 3Ph 50/60Hz |
| Ultimate power | kW (hp) | 7.2 (9.6) | 8.8 (11.8) | 9.4 (12.6) | 10.5 (14) | 11.1 (14.9) | 12 (16) | |
| Full load power | kW (hp) | 17.3 (23.2) | 16 (21.5) | 18.5 (24.8) | 22 (30) | 24 (32.2) | 24 (32.2) | |
| Cooling | Connection | inch | ⅜" BSP male | ⅜" BSP male | ⅜" BSP male | ⅜" BSP male | ⅜" BSP male | ⅜" BSP male |
| Cooling flow (Always on) | l/min (gal/min) |
10 (2.6) | 12 (3.2) | 12 (3.2) | 12 (3.2) | 15 (4) | 15 (4) | |
| Minimum differential pressure | bar | 1 | 1 | 1 | 1 | 1 | 1 | |
| Maximum supply pressure | barg (psig) |
6.9 (100) | 6.9 (100) | 6.9 (100) | 6.9 (100) | 6.9 (100) | 6.9 (100) | |
| Temperature | °C (°F) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | |
| Purge | Connection | inch | ½" BSP male | ½" BSP male | ½" BSP male | ½" BSP male | ½" BSP male | ½" BSP male |
| Pressure | barg (psig) |
2.5-6.9 (36-100) | 2.5-6.9 (36-100) | 2.5-6.9 (36-100) | 2.5-6.9 (36-100) | 2.5-6.9 (36-100) | 2.5-6.9 (36-100) | |
| Shaft seal flow (Always on) | l/min (gal/min) |
12 (3.17) | 12 (3.17) | 12 (3.17) | 12 (3.17) | 12 (3.17) | 12 (3.17) | |
| Gas ballast flow (Manual adj.) | l/min (gal/min) |
0-130 (0-34.3) | 0-130 (0-34.3) | 0-130 (0-34.3) | 0-130 (0-34.3) | 0-130 (0-34.3) | 0-130 (0-34.3) | |
| Operation | Ambient temperature range | °C (°F) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) | 5-40 (41-104) |
| Noise level with silencer | dB(A) | <64 | <64 | <64 | <70 | <70 | <70 | |
| Maximum exhaust back pressure | bara (psig) |
1.2 (17.4) | 1.2 (17.4) | 1.2 (17.4) | 1.2 (17.4) | 1.2 (17.4) | 1.2 (17.4) | |
| Lubrication | Oil | PFPE Drynert 25/6 | PFPE Drynert 25/6 | PFPE Drynert 25/6 | PFPE Drynert 25/6 | PFPE Drynert 25/6 | PFPE Drynert 25/6 | |
| Oil volume | l (gal) | 1.8 (0.5) | 2.5 (0.7) | 3.6 (1.0) | 2.4 (0.6) | 3.1 (0.8) | 4.2 (1.1) |
Trusted By Industry Leaders
Trusted by leading organisations across R&D, semiconductor, pharmaceutical, and industrial sectors, we deliver reliable vacuum solutions backed by decades of technical expertise.