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Downstream Valves

Downstream Valves

Downstream Valves and Pressure Controllers

MKS is the established leader in downstream pressure control subsystems which integrate exhaust throttle valves, advanced digital controllers and Baratron® process manometers. Our total solutions provide higher throughput with faster set points, reduced overshoot/undershoot, and increased uptime. Downstream Pressure Control Valves are used downstream of the vacuum chamber to throttle the gas flow exiting the system.


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Products

Butterfly/Throttle Valves with Integrated Controllers

  • T2B EtherCAT® Exhaust Throttle Valve
  • T3B High Speed Exhaust Throttle Valve
  • 683B "Smart" Exhaust Throttle Valve for DeviceNet™ Networks
  • 153D "Smart" Exhaust Throttle Valve

Butterfly/Throttle Valves with Remote Controllers

  • 253B Exhaust Throttle Valve
  • 653B Exhaust Throttle Valve with High-Speed Motor/Gear Assembly
  • 651C Digital/Analog Pressure Controller
  • 1651C Displayless Digital Pressure Controller

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From renewable energy, standard recycling programme for all our pumps, to favouring energy efficient products, we strive to reduce our environmental footprint as a company as well as our products and services

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