{"product_id":"spectra-series","title":"Spectra Series","description":"\u003ch2\u003eSPECTRA G\u003c\/h2\u003e\n\u003cp\u003eThe Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.\u003c\/p\u003e\n\u003ch3\u003eTechnology\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e4 Stage Combustion \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe unique 4-stage combustion system of the Spectra-G ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of oxide powders on the combustor nozzles and maximizing uptime.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEffective Powder Handling System \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe oxide powders generated by the combustion of metalorganics are entrapped in the cooling air stream that is introduced in the Spectra-G at a velocity of 10 m\/sec.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eAir flow is generated by the house extraction system. This air-cooled design ensures that combustion by-products are efficiently transported from the Spectra-G to the factory central scrubber or dust filter.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eOptimum Combustion \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNitride MOCVD processes involve the use of high H2 and NH3 flows. The Spectra-G utilizes the inherent flammability of these gases to minimize the additional fuel required to complete the gas abatement reactions (oxidation). Different fuel types are available to suit customer requirements.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eThe high gas capacity of the Spectra-G allows up to six production MOCVD tools to be connected. Each individual inlet allows each exhaust to act independently, thereby reducing capital and running costs.\u003c\/p\u003e\n\u003ch2\u003eSPECTRA Z\u003c\/h2\u003e\n\u003cp\u003eThe Spectra-Z system is a cost effective, reliable, high performance exhaust treatment solution for the latest generation Flat Panel Display (FPD) and Solar Cell manufacturing processes.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e4 Stage Combustion \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe unique 4-stage combustion system of the Spectra-Z ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of silica powders on the combustor nozzles.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEffective Powder Handling System \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe powders generated by the combustion of SiH4 and PH3 are entrapped in the cooling air stream that is introduced in the Spectra-Z at a velocity of 10 m\/sec. Air flow is generated by the house extraction system. This air-cooled design ensures that combustion by-products are efficiently transported from the Spectra-Z to the factory central scrubber or dust filter.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eBy-Product Destruction \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eIn the Flat Panel CVD 8 solar cell process hydride gases SiH4, PH3, NH3) flow through the process chamber. The Spectra-Z abates these gases and related by products in a cost efficient manner by operating at an optimized fuel rate.\u003c\/p\u003e\n\u003cp\u003eFor 'clean' gas abatement, please contact your Edwards Exhaust Management Specialist.\u003c\/p\u003e\n\u003ch2\u003eUser Friendly System\u003c\/h2\u003e\n\u003cp\u003e\u003cstrong\u003eEase of use\u003c\/strong\u003e - The Spectra is configured, monitored and controlled via a large touch-screen display. Fourgauges display the fuel gas and extraction pressures.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eComponent Accessibility\u003c\/strong\u003e - Designed for fast maintenance - all electrical components are accessible from the front of the Spectra and all mechanical components are easily accessible from the left side of the system.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEasy communication\u003c\/strong\u003e - The PLC and built-in computer of the Spectra allow easy communication with the vacuum pumps, the process tool and the factory monitoring system.\u003c\/p\u003e\n\u003ch2\u003eFeatures and Benefits\u003c\/h2\u003e\n\u003cul\u003e\n\u003cli\u003eHigh Abatement Performance\u003c\/li\u003e\n\u003cli\u003eCapable of treating all exhaust gases from multiple MOCVD production tools\u003c\/li\u003e\n\u003cli\u003eProven Superior Reliability\u003c\/li\u003e\n\u003cli\u003eRisk Management\u003c\/li\u003e\n\u003cli\u003eCombustion of all flammable gases\u003c\/li\u003e\n\u003cli\u003eAir-cooled design as standard\u003c\/li\u003e\n\u003cli\u003eLow Cost of Ownership\u003c\/li\u003e\n\u003cli\u003eMinimum fuel gas consumption for full process gas abatement\u003c\/li\u003e\n\u003cli\u003eUp to six process inlets\u003c\/li\u003e\n\u003cli\u003eNo water or oxygen requirement\u003c\/li\u003e\n\u003cli\u003eLow power consumption\u003c\/li\u003e\n\u003cli\u003eLow nitrogen consumption\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57523692667262,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_60.png?v=1780895979","url":"https:\/\/vacpro.dk\/products\/spectra-series","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}