{"product_id":"process-monitors","title":"Process Monitors","description":"\u003cp\u003eEach system is specifically designed to monitor, alarm and help control the conditions found within these applications:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eVision 2000-B™ Vacuum Baseline Monitor RGA - monitors vacuum pump down, baseline, and leak back conditions on manufacturing tools (up to 7.6e-5 Torr maximum operating pressure)\u003c\/li\u003e\n\u003cli\u003eVision 2000-C™ \u0026amp; Vision 2000-E™ and Vision 2000-C™ XD \u0026amp; Vision 2000-E™ XD High Sensitivity RGAs - multiple pressure monitoring of gas species during etch, CVD and ALD processes (up to 1e-3 Torr maximum operating pressure).\u003c\/li\u003e\n\u003cli\u003eVision 2000-P™ and Vision 2000-P™ XD High Sensitivity Process Monitor RGAs - select pressure monitoring for contamination levels e.g. during the PVD process (up to 7.6e-3 Torr maximum operating pressure)\u003c\/li\u003e\n\u003cli\u003e300mm Resist-Torr® and 300mm Resist-Torr® XD High Sensitivity RGAs - detection of photoresist contamination during high pressure (~8 Torr maximum operating pressure) degas\u003c\/li\u003e\n\u003cli\u003eHPQ3 \u0026amp; HPQ3S High Pressure RGAs - high pressure (up to 1e-3 Torr and 8e-3 Torr maximum operating pressure respectively) monitoring of inert gases including; process and pump down monitoring, leak detection, vacuum diagnostics and rate of rise\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eFor the most demanding applications where optimum sensitivity and reproducibility is required the process mass spectrometry range is available with V-lens™ patented technology (Vision 2000-C XD, Vision 2000-E XD, Vision 2000-P XD) which allows for a significantly reduced background noise and enhanced sensitivity.\u003c\/p\u003e\n\u003cp\u003eVisit MKS site for more information of these products\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548103811454,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_78_30d7e4b1-c61c-42df-a1bf-d50b10d4be7a.png?v=1781509144","url":"https:\/\/vacpro.dk\/products\/process-monitors","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}