{"title":"Mass Spectrometry Solutions","description":"\u003cp\u003eSensitive and Reproducible Gas Process Monitoring \u0026amp; Control\u003c\/p\u003e\n\u003cp\u003eMKS has 30 years of experience developing and delivering state-of-the-art hardware and software products for gas analysis.\u003c\/p\u003e\n\u003cp\u003eOur wide range of powerful, versatile, and proven mass spectrometry-based solutions deliver a new level of understanding and control in vacuum and gas-related applications to customers. For decades, MKS has been a keen innovator and trusted technology partner in:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eUltra-high and high vacuum applications\u003c\/li\u003e\n\u003cli\u003eProcess monitoring in manufacturing environments\u003c\/li\u003e\n\u003cli\u003eAtmospheric and analytical applications\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eBy working closely with customers, MKS continues to deliver valuable analytical solutions to address and overcome the toughest challenges in the key markets that are driving today's technology revolution. Focus markets include but are not limited to semiconductor, thin film, flat panel display, solar, aerospace, automotive, vacuum R\u0026amp;D, catalysis, and high energy physics.\u003c\/p\u003e","products":[{"product_id":"process-monitors","title":"Process Monitors","description":"\u003cp\u003eEach system is specifically designed to monitor, alarm and help control the conditions found within these applications:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eVision 2000-B™ Vacuum Baseline Monitor RGA - monitors vacuum pump down, baseline, and leak back conditions on manufacturing tools (up to 7.6e-5 Torr maximum operating pressure)\u003c\/li\u003e\n\u003cli\u003eVision 2000-C™ \u0026amp; Vision 2000-E™ and Vision 2000-C™ XD \u0026amp; Vision 2000-E™ XD High Sensitivity RGAs - multiple pressure monitoring of gas species during etch, CVD and ALD processes (up to 1e-3 Torr maximum operating pressure).\u003c\/li\u003e\n\u003cli\u003eVision 2000-P™ and Vision 2000-P™ XD High Sensitivity Process Monitor RGAs - select pressure monitoring for contamination levels e.g. during the PVD process (up to 7.6e-3 Torr maximum operating pressure)\u003c\/li\u003e\n\u003cli\u003e300mm Resist-Torr® and 300mm Resist-Torr® XD High Sensitivity RGAs - detection of photoresist contamination during high pressure (~8 Torr maximum operating pressure) degas\u003c\/li\u003e\n\u003cli\u003eHPQ3 \u0026amp; HPQ3S High Pressure RGAs - high pressure (up to 1e-3 Torr and 8e-3 Torr maximum operating pressure respectively) monitoring of inert gases including; process and pump down monitoring, leak detection, vacuum diagnostics and rate of rise\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eFor the most demanding applications where optimum sensitivity and reproducibility is required the process mass spectrometry range is available with V-lens™ patented technology (Vision 2000-C XD, Vision 2000-E XD, Vision 2000-P XD) which allows for a significantly reduced background noise and enhanced sensitivity.\u003c\/p\u003e\n\u003cp\u003eVisit MKS site for more information of these products\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548103811454,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_78_30d7e4b1-c61c-42df-a1bf-d50b10d4be7a.png?v=1781509144"},{"product_id":"cirrus™3","title":"Cirrus™3","description":"\u003ch3\u003eProducts\u003c\/h3\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1650\" target=\"_blank\" rel=\"noopener\"\u003eCirrus 3\u003c\/a\u003e is an ideal general purpose gas analyzer and shares a common design with the Cirrus 3-XD. Both are available in rack-mounted and bench top configurations, making it easy for integration into laboratory or manufacturing environments. The capillary inlet system provides fast gas response over a range of temperatures. The unique oven and vacuum system designs eliminate potential cold spots and provide high temperature stability and performance.\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1468\" target=\"_blank\" rel=\"noopener\"\u003eThe Cirrus 3-XD\u003c\/a\u003e provides eXtreme Detection capability with V-lens™ ion-optics technology. With this technology, you can now consistently detect gases in the low ppb range, even with the most challenging background gases. This novel design ensures a gas-independent ultralow noise baseline across the entire mass range. The Cirrus 3-XD can provide greater insight into your gas system, something not possible with conventional quadrupole mass spectrometry.\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/Cirrus3XD-DS.pdf?v=1620407485\" target=\"_blank\" rel=\"noopener\"\u003eDownload data sheet for more information\u003c\/a\u003e\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548107022718,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_79_9b670902-cbd9-43c8-9a74-25b6c5655f27.png?v=1781509490"}],"url":"https:\/\/vacpro.dk\/collections\/mass-spectrometry-solutions.oembed","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}