{"title":"FTIR\/NDIR Infrared Gas Analysis Instruments, Residual Gas Analysers \u0026 Leak Detection","description":"","products":[{"product_id":"process-monitors","title":"Process Monitors","description":"\u003cp\u003eEach system is specifically designed to monitor, alarm and help control the conditions found within these applications:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eVision 2000-B™ Vacuum Baseline Monitor RGA - monitors vacuum pump down, baseline, and leak back conditions on manufacturing tools (up to 7.6e-5 Torr maximum operating pressure)\u003c\/li\u003e\n\u003cli\u003eVision 2000-C™ \u0026amp; Vision 2000-E™ and Vision 2000-C™ XD \u0026amp; Vision 2000-E™ XD High Sensitivity RGAs - multiple pressure monitoring of gas species during etch, CVD and ALD processes (up to 1e-3 Torr maximum operating pressure).\u003c\/li\u003e\n\u003cli\u003eVision 2000-P™ and Vision 2000-P™ XD High Sensitivity Process Monitor RGAs - select pressure monitoring for contamination levels e.g. during the PVD process (up to 7.6e-3 Torr maximum operating pressure)\u003c\/li\u003e\n\u003cli\u003e300mm Resist-Torr® and 300mm Resist-Torr® XD High Sensitivity RGAs - detection of photoresist contamination during high pressure (~8 Torr maximum operating pressure) degas\u003c\/li\u003e\n\u003cli\u003eHPQ3 \u0026amp; HPQ3S High Pressure RGAs - high pressure (up to 1e-3 Torr and 8e-3 Torr maximum operating pressure respectively) monitoring of inert gases including; process and pump down monitoring, leak detection, vacuum diagnostics and rate of rise\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eFor the most demanding applications where optimum sensitivity and reproducibility is required the process mass spectrometry range is available with V-lens™ patented technology (Vision 2000-C XD, Vision 2000-E XD, Vision 2000-P XD) which allows for a significantly reduced background noise and enhanced sensitivity.\u003c\/p\u003e\n\u003cp\u003eVisit MKS site for more information of these products\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548103811454,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_78_30d7e4b1-c61c-42df-a1bf-d50b10d4be7a.png?v=1781509144"},{"product_id":"cirrus™3","title":"Cirrus™3","description":"\u003ch3\u003eProducts\u003c\/h3\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1650\" target=\"_blank\" rel=\"noopener\"\u003eCirrus 3\u003c\/a\u003e is an ideal general purpose gas analyzer and shares a common design with the Cirrus 3-XD. Both are available in rack-mounted and bench top configurations, making it easy for integration into laboratory or manufacturing environments. The capillary inlet system provides fast gas response over a range of temperatures. The unique oven and vacuum system designs eliminate potential cold spots and provide high temperature stability and performance.\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1468\" target=\"_blank\" rel=\"noopener\"\u003eThe Cirrus 3-XD\u003c\/a\u003e provides eXtreme Detection capability with V-lens™ ion-optics technology. With this technology, you can now consistently detect gases in the low ppb range, even with the most challenging background gases. This novel design ensures a gas-independent ultralow noise baseline across the entire mass range. The Cirrus 3-XD can provide greater insight into your gas system, something not possible with conventional quadrupole mass spectrometry.\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/Cirrus3XD-DS.pdf?v=1620407485\" target=\"_blank\" rel=\"noopener\"\u003eDownload data sheet for more information\u003c\/a\u003e\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548107022718,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_79_9b670902-cbd9-43c8-9a74-25b6c5655f27.png?v=1781509490"},{"product_id":"gascheck-g3","title":"Gascheck G3","description":"\u003cstyle\u003e\n  .custom-product-table-wrapper {\n    width: 100%;\n    overflow-x: auto;\n  }\n\n  .custom-product-table {\n    width: 100%;\n    table-layout: fixed;\n    border-collapse: collapse;\n  }\n\n  .custom-product-table th,\n  .custom-product-table td {\n    padding: 10px 12px;\n    vertical-align: middle;\n    text-align: center;\n  }\n\n  .custom-product-table td:first-child,\n  .custom-product-table th:first-child {\n    text-align: left;\n  }\n\n  .custom-product-table img {\n    max-width: 90px;\n    height: auto;\n    display: block;\n    margin: 0 auto;\n  }\n\n  .custom-product-table h3 {\n    margin: 0;\n    font-size: 24px;\n  }\n\n  .custom-product-table strong {\n    white-space: nowrap;\n  }\n\u003c\/style\u003e\n\u003cdiv class=\"custom-product-table-wrapper\"\u003e\n\u003ctable class=\"custom-product-table\" style=\"width: 100%; height: 243.531px;\"\u003e\n\u003ccolgroup\u003e \u003ccol style=\"width: 40%;\"\u003e \u003ccol style=\"width: 30%;\"\u003e \u003ccol style=\"width: 30%;\"\u003e \u003c\/colgroup\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003e\n\u003ch3 style=\"text-align: left;\"\u003eTechnical Data\u003c\/h3\u003e\n\u003c\/th\u003e\n\u003cth\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan class=\"th_clm\"\u003e \u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image-2026-06-15T131822.752.png?v=1781509709\" alt=\"\"\u003e\u003cstrong\u003eGasCheck G3\u003c\/strong\u003e \u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMin detectable limits of some common gases:\u003c\/td\u003e\n\u003ctd\u003eR134A\u003cbr\u003eHelium\u003cbr\u003eArgon\u003cbr\u003eCarbon Dioxide\u003cbr\u003eSulphur Hexafluoride\u003c\/td\u003e\n\u003ctd\u003e5.8 x 10⁻⁵ cc\/sec\u003cbr\u003e1.0 x 10⁻⁵ cc\/sec\u003cbr\u003e3.5 x 10⁻⁵ cc\/sec\u003cbr\u003e4.0 x 10⁻⁵ cc\/sec\u003cbr\u003e2.2 x 10⁻⁵ cc\/sec\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecovery time\u003c\/td\u003e\n\u003ctd\u003eShort probe\u003cbr\u003eLong Probe\u003c\/td\u003e\n\u003ctd\u003e1 s\u003cbr\u003e9 s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating temp range\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003e0 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548107645310,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image-2026-06-15T131822.752.png?v=1781509709"}],"url":"https:\/\/vacpro.dk\/collections\/ftir-ndir-infrared-gas-analysis-instruments-residual-gas-analysers-leak-detection.oembed","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}